Hitachi’s Spherical Aberration Corrected STEM: HD-2700
نویسندگان
چکیده
INTRODUCTION AS VLSI (very large scale integration) technology evolves toward ever smaller features and multilayer designs, analysis and control of structures and compositions at the atomic level is becoming increasingly important. In 1998 Hitachi HighTechnologies Corporation released the HD-2000, a STEM (scanning transmission electron microscope) that was very well received for combining the ease of operation of a SEM (scanning electron microscope) with the excellent resolution of a TEM (transmission electron microscope). Now in collaboration with the German company CEOS GmbH, we have developed the HD-2700, a high-end addition to the HD series that effectively eliminates spherical aberration. This paper will provide a summary overview of the development concept, the basic capabilities, and some typical VLSI device analysis results for the HD-2700 STEM.
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